Inventor
SAMESHIMA TAKASHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SAMESHIMA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS11802334B2Oct 31, 2023
Tungsten film-forming method, film-forming system and storage medium
TOKYO ELECTRON LTD0 citations62
US11401609B2Aug 2, 2022
Film forming method and film forming system
TOKYO ELECTRON LTD0 citations62
US11171004B2Nov 9, 2021
Film forming method and substrate processing system
TOKYO ELECTRON LTD0 citations62
US10954593B2Mar 23, 2021
Tungsten film-forming method, film-forming system and storage medium
TOKYO ELECTRON LTD0 citations62
US10886170B2Jan 5, 2021
Method of forming tungsten film
TOKYO ELECTRON LTD0 citations62
US10784110B2Sep 22, 2020
Tungsten film forming method, film forming system and film forming apparatus
TOKYO ELECTRON LTD0 citations51
US10612139B2Apr 7, 2020
Method of forming a tungsten film having a low resistance
TOKYO ELECTRON LTD0 citations51
US11028479B2Jun 8, 2021
Method of forming film
TOKYO ELECTRON LTD0 citations50