Inventor
RODRIGUEZ JOSE O
US4 patents
Patents
4 patentsUS6059638AMay 9, 2000
Magnetic force carrier and ring for a polishing apparatus
LUCENT TECHNOLOGIES INC82 citations94
US6123602ASep 26, 2000
Portable slurry distribution system
LUCENT TECHNOLOGIES INC23 citations84
US6093086AJul 25, 2000
Polishing head release mechanism
LUCENT TECHNOLOGIES INC6 citations73
US6140211AOct 31, 2000
Method for recycling wafers used for quality assurance testing of integrated circuit fabrication equipment
LUCENT TECHNOLOGIES INC14 citations72