Inventor
YAMAGE MASASHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGE MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
5 patentsUS6059922AMay 9, 2000
Plasma processing apparatus and a plasma processing method
TOSHIBA KK61 citations93
US6184687B1Feb 6, 2001
Plasma process end point determination method and apparatus, and plasma evaluation method and apparatus
TOSHIBA KK21 citations91
US5955382ASep 21, 1999
Microwave excitation plasma processing apparatus and microwave excitation plasma processing method
TOSHIBA KK26 citations90
US10837113B2Nov 17, 2020
Shower head, processing apparatus, and shower plate
TOSHIBA KK2 citations70
US10971334B2Apr 6, 2021
High frequency antenna and plasma processing device
TOSHIBA KK0 citations50