Inventor
CHAE YUN-SOOK
KR8 patents
Patents
8 patentsUS6197683B1Mar 6, 2001
Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact of semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD316 citations99
US6174809B1Jan 16, 2001
Method for forming metal layer using atomic layer deposition
SAMSUNG ELECTRONICS CO LTD1,166 citations99
US6478872B1Nov 12, 2002
Method of delivering gas into reaction chamber and shower head used to deliver gas
SAMSUNG ELECTRONICS CO LTD814 citations98
US6458701B1Oct 1, 2002
Method for forming metal layer of semiconductor device using metal halide gas
SAMSUNG ELECTRONICS CO LTD238 citations98
US6372598B2Apr 16, 2002
Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same
SAMSUNG ELECTRONICS CO LTD283 citations98
US6835970B2Dec 28, 2004
Semiconductor device having self-aligned contact pads and method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD13 citations83
US7297466B2Nov 20, 2007
Method of forming a photoresist pattern and method for patterning a layer using a photoresist
SAMSUNG ELECTRONICS CO LTD7 citations74
US7572736B2Aug 11, 2009
Method of dry-etching semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations41