Inventor
SONG SANG-HO
KR7 patents
Patents
7 patentsUS6787906B1Sep 7, 2004
Bit line pad and borderless contact on bit line stud with localized etch stop layer formed in an undermined region
SAMSUNG ELECTRONICS CO LTD36 citations92
US6479343B1Nov 12, 2002
DRAM cell capacitor and manufacturing method thereof
SAMSUNG ELECTRONICS CO LTD26 citations92
US6391736B1May 21, 2002
Method for fabricating a capacitor of a semiconductor device and a capacitor made thereby
SAMSUNG ELECTRONICS CO LTD31 citations91
US6670663B2Dec 30, 2003
DRAM cell capacitor and manufacturing method thereof
SAMSUNG ELECTRONICS CO LTD10 citations73
US6828617B2Dec 7, 2004
Method for fabricating a capacitor of a semiconductor device and a capacitor made thereby
SAMSUNG ELECTRONICS CO LTD8 citations72
US6812572B2Nov 2, 2004
Bit line landing pad and borderless contact on bit line stud with localized etch stop layer formed in void region, and manufacturing method thereof
SAMSUNG ELECTRONICS CO LTD4 citations62
US7553748B2Jun 30, 2009
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD5 citations57