Inventor
KO CHANG HYUN
KR18 patents
⚠️ This page may combine multiple inventors who share the name “KO CHANG HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS6797561B2Sep 28, 2004
Method of fabricating a capacitor of a semiconductor device
SAMSUNG ELECTRONICS CO LTD26 citations92
US7007933B2Mar 7, 2006
Method and apparatus for supplying a source gas
SAMSUNG ELECTRONICS CO LTD13 citations83
US7005389B2Feb 28, 2006
Methods for forming a thin film on an integrated circuit device by sequentially providing energies to activate the reactants
SAMSUNG ELECTRONICS CO LTD8 citations73
US7153362B2Dec 26, 2006
System and method for real time deposition process control based on resulting product detection
SAMSUNG ELECTRONICS CO LTD5 citations62
KOREA ENERGY RESEARCH INST
3 patentsUS8377205B2Feb 19, 2013
Apparatus for producing silicon nanocrystals using inductively coupled plasma
KOREA ENERGY RESEARCH INST2 citations59
US9067852B2Jun 30, 2015
Production of high purity butene-1 from C4 olefins/paraffins mixed gas
KOREA ENERGY RESEARCH INST0 citations50
US9034185B2May 19, 2015
Separation of olefins from olefins/paraffins mixed gas
KOREA ENERGY RESEARCH INST1 citations50
UNIV NAT CHONNAM IND FOUND
3 patentsUS11918981B2Mar 5, 2024
Perovskite metal oxide catalyst, in which metal ion is substituted, for reducing carbon deposition, preparation method therefor, and methane reforming reaction method using same
UNIV NAT CHONNAM IND FOUND0 citations50
US10029238B2Jul 24, 2018
Selective surface impregnation method for catalytically active materials on particulate catalyst support using mutual repulsive force and solubility difference between hydrophilic solvent and hydrophobic solvent
UNIV NAT CHONNAM IND FOUND0 citations43
US9861962B2Jan 9, 2018
Selective surface impregnation method for catalytically active materials on particulate catalyst support using mutual repulsive force and soblubility difference between hydrophilic solvent and hydrophobic solvent
UNIV NAT CHONNAM IND FOUND0 citations43