Inventor
TADA AKIFUMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TADA AKIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
USHIO ELECTRIC INC
3 patentsUS6754247B2Jun 22, 2004
ArF excimer laser devices, KrF excimer laser devices and fluorine alser devices
USHIO ELECTRIC INC4 citations60
US6621847B1Sep 16, 2003
Narrow-band excimer laser apparatus
USHIO ELECTRIC INC6 citations59
US6590921B2Jul 8, 2003
Narrow beam ArF excimer laser device
USHIO ELECTRIC INC4 citations57