Inventor

MARUYAMA SHIGENAO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “MARUYAMA SHIGENAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAKECHI HIROAKI

1 patent

US8600543B2Dec 3, 2013

Apparatus and method for controlling temperature of semiconductor wafers

TAKECHI HIROAKI9 citations78

MAEKAWA SEISAKUSHO KK

1 patent

US4971141ANov 20, 1990

Jet stream injection system

MAEKAWA SEISAKUSHO KK4 citations60

MARUYAMA SHIGENAO

1 patent

US8511261B2Aug 20, 2013

Piston cooling device

MARUYAMA SHIGENAO6 citations58

KEIHIN CORP

1 patent

US10791650B2Sep 29, 2020

Cooling device

KEIHIN CORP1 citations51

SEMITEC CORP

1 patent

US12487131B2Dec 2, 2025

Temperature measurement device, temperature measurement method, and temperature attenuation measurement method

SEMITEC CORP0 citations40