Inventor
YANG LOUIS
US5 patents
Patents
5 patentsUS6759327B2Jul 6, 2004
Method of depositing low k barrier layers
APPLIED MATERIALS INC38 citations95
US6699784B2Mar 2, 2004
Method for depositing a low k dielectric film (K>3.5) for hard mask application
APPLIED MATERIALS INC42 citations91
US6849562B2Feb 1, 2005
Method of depositing a low k dielectric barrier film for copper damascene application
APPLIED MATERIALS INC10 citations73
US7125813B2Oct 24, 2006
Method of depositing low K barrier layers
APPLIED MATERIALS INC2 citations62
US7319068B2Jan 15, 2008
Method of depositing low k barrier layers
APPLIED MATERIALS INC0 citations51