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Inventor
UEDA KOSEI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “UEDA KOSEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UEDA KOSEI
2 patents
US8129282B2
Mar 6, 2012
Plasma etching method and computer-readable storage medium
UEDA KOSEI
3 citations
53
US8609547B2
Dec 17, 2013
Plasma etching method and computer-readable storage medium
UEDA KOSEI
0 citations
42
CANON KK
1 patent
US7510112B2
Mar 31, 2009
Data processing device, consumable information notification method, storage medium for storing computer-readable program, and program
CANON KK
2 citations
53
TOKYO ELECTRON LTD
1 patent
US9793136B2
Oct 17, 2017
Plasma etching method
TOKYO ELECTRON LTD
0 citations
37