Inventor
KOIZUMI MASAKI
JP5 patents
Patents
5 patentsUS10483100B2Nov 19, 2019
Method for forming TiON film
TOKYO ELECTRON LTD42 citations91
US10927453B2Feb 23, 2021
TiN-based film and TiN-based film forming method
TOKYO ELECTRON LTD0 citations60
US10199451B2Feb 5, 2019
Lower electrode of DRAM capacitor and manufacturing method thereof
TOKYO ELECTRON LTD0 citations49
US8021717B2Sep 20, 2011
Film formation method, cleaning method and film formation apparatus
TOKYO ELECTRON LTD0 citations39
US10529598B2Jan 7, 2020
Microwave heat treatment apparatus and microwave heat treatment method
TOKYO ELECTRON LTD0 citations36