Inventor
KOIZUMI MASATO
JP5 patents
Patents
5 patentsUS6404021B1Jun 11, 2002
Laminated structure and a method of forming the same
TOKYO ELECTRON LTD8 citations73
US6042653AMar 28, 2000
Susceptor for bearing an object to be processed thereon
TOKYO ELECTRON LTD12 citations72
US7713886B2May 11, 2010
Film forming apparatus, film forming method, program and storage medium
TOKYO ELECTRON LTD6 citations60
US6489208B2Dec 3, 2002
Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon
TOKYO ELECTRON LTD0 citations51
US8021717B2Sep 20, 2011
Film formation method, cleaning method and film formation apparatus
TOKYO ELECTRON LTD0 citations39