Inventor

VERVOORDELDONK MICHAEL JOHANNES

NL9 patents

⚠️ This page may combine multiple inventors who share the name “VERVOORDELDONK MICHAEL JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VERVOORDELDONK MICHAEL JOHANNES

4 patents

US8091694B2Jan 10, 2012

Actuator arrangement for active vibration isolation comprising an inertial reference mass

VERVOORDELDONK MICHAEL JOHANNES8 citations81

US8885147B2Nov 11, 2014

Lithographic apparatus and device manufacturing method

VERVOORDELDONK MICHAEL JOHANNES5 citations68

US8279401B2Oct 2, 2012

Position control system, a lithographic apparatus and a method for controlling a position of a movable object

VERVOORDELDONK MICHAEL JOHANNES4 citations59

US8915340B2Dec 23, 2014

Actuator arrangement for active vibration isolation comprising an inertial reference mass

VERVOORDELDONK MICHAEL JOHANNES1 citations44

ASML NETHERLANDS BV

2 patents

US10866529B2Dec 15, 2020

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations51

US10345723B2Jul 9, 2019

Substrate handling system and lithographic apparatus

ASML NETHERLANDS BV0 citations51

KONINKL PHILIPS ELECTRONICS NV

1 patent

US7571793B2Aug 11, 2009

Actuator arrangement for active vibration isolation using a payload as an inertial reference mass

KONINKL PHILIPS ELECTRONICS NV21 citations89

VERWEIJ ANTOINE HENDRIK

1 patent

US8059261B2Nov 15, 2011

Masking device, lithographic apparatus, and device manufacturing method

VERWEIJ ANTOINE HENDRIK11 citations73

VAN DER TOORN JAN-GERARD CORNELIS

1 patent

US9097990B2Aug 4, 2015

Lithographic apparatus and stage system

VAN DER TOORN JAN-GERARD CORNELIS0 citations43