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Inventor
PATTAR YASHASWINI
US
3 patents
⚠️ This page may combine multiple inventors who share the name “PATTAR YASHASWINI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US8962488B2
Feb 24, 2015
Synchronized radio frequency pulsing for plasma etching
APPLIED MATERIALS INC
30 citations
93
US10854425B2
Dec 1, 2020
Feedforward temperature control for plasma processing apparatus
APPLIED MATERIALS INC
1 citations
61
LIAO BRYAN
1 patent
US8404598B2
Mar 26, 2013
Synchronized radio frequency pulsing for plasma etching
LIAO BRYAN
77 citations
94