Inventor
SHOJI SERGIO FUKUDA
US18 patents
⚠️ This page may combine multiple inventors who share the name “SHOJI SERGIO FUKUDA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS9788405B2Oct 10, 2017
RF power delivery with approximated saw tooth wave pulsing
APPLIED MATERIALS INC47 citations93
US8962488B2Feb 24, 2015
Synchronized radio frequency pulsing for plasma etching
APPLIED MATERIALS INC30 citations93
US10378108B2Aug 13, 2019
Showerhead with reduced backside plasma ignition
APPLIED MATERIALS INC6 citations84
US9269587B2Feb 23, 2016
Methods for etching materials using synchronized RF pulses
APPLIED MATERIALS INC8 citations83
US10745807B2Aug 18, 2020
Showerhead with reduced backside plasma ignition
APPLIED MATERIALS INC3 citations73
US10242893B2Mar 26, 2019
Method and apparatus for de-chucking a workpiece using a swing voltage sequence
APPLIED MATERIALS INC2 citations73
US10504765B2Dec 10, 2019
Electrostatic chuck assembly having a dielectric filler
APPLIED MATERIALS INC2 citations72
US10490429B2Nov 26, 2019
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC2 citations71
US9909213B2Mar 6, 2018
Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors
APPLIED MATERIALS INC3 citations70
US10930540B2Feb 23, 2021
Electrostatic chuck assembly having a dielectric filler
APPLIED MATERIALS INC0 citations62
US10854427B2Dec 1, 2020
Radio frequency (RF) pulsing impedance tuning with multiplier mode
APPLIED MATERIALS INC1 citations62
US11615973B2Mar 28, 2023
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC0 citations61
US10854425B2Dec 1, 2020
Feedforward temperature control for plasma processing apparatus
APPLIED MATERIALS INC1 citations61
US10784132B2Sep 22, 2020
Method and apparatus for de-chucking a workpiece using a swing voltage sequence
APPLIED MATERIALS INC0 citations52
US12476081B2Nov 18, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations47