Inventor

KUMNIG FRANZ

AT7 patents

⚠️ This page may combine multiple inventors who share the name “KUMNIG FRANZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES AG

2 patents

US11195730B2Dec 7, 2021

Method and apparatus for processing wafer-shaped articles

LAM RES AG2 citations68

US10490426B2Nov 26, 2019

Method and apparatus for processing wafer-shaped articles

LAM RES AG1 citations57

OBWEGER RAINER

2 patents

US8833380B2Sep 16, 2014

Device for treating disc-like articles

OBWEGER RAINER2 citations60

US8490634B2Jul 23, 2013

Device for treating disc-like articles

OBWEGER RAINER3 citations60

KUMNIG FRANZ

1 patent

US8646767B2Feb 11, 2014

Device for holding wafer shaped articles

KUMNIG FRANZ8 citations77

OKORN-SCHMIDT HARALD

1 patent

US8668777B2Mar 11, 2014

Process for treating a semiconductor wafer

OKORN-SCHMIDT HARALD0 citations48

TSCHINDERLE ULRICH

1 patent

US9633890B2Apr 25, 2017

Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device

TSCHINDERLE ULRICH1 citations47