Inventor

PETERSEN III CARL T

US3 patents

⚠️ This page may combine multiple inventors who share the name “PETERSEN III CARL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US4433951AFeb 28, 1984

Modular loadlock

LAM RES CORP98 citations93

US4483654ANov 20, 1984

Workpiece transfer mechanism

LAM RES CORP48 citations89

XU REN

1 patent

US8697189B2Apr 15, 2014

Method and apparatus for precision surface modification in nano-imprint lithography

XU REN0 citations47