Inventor
IWASAKI TAKAHISA
JP4 patents
Patents
4 patentsUS11404282B2Aug 2, 2022
Method of etching film and plasma processing apparatus
TOKYO ELECTRON LTD2 citations66
US12217973B2Feb 4, 2025
Method of etching film and plasma processing apparatus
TOKYO ELECTRON LTD0 citations56
US10770268B2Sep 8, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38
US9202706B2Dec 1, 2015
Method of forming pattern and solid-state image sensor device
TOKYO ELECTRON LTD0 citations28