Inventor

HATOH HIDEYUKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HATOH HIDEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9460895B2Oct 4, 2016

Gas supply method for semiconductor manufacturing apparatus, gas supply system, and semiconductor manufacturing apparatus

TOKYO ELECTRON LTD1 citations48

US9202706B2Dec 1, 2015

Method of forming pattern and solid-state image sensor device

TOKYO ELECTRON LTD0 citations28

ONO KATSUYUKI

1 patent

US8664117B2Mar 4, 2014

Method for manufacturing semiconductor device using anisotropic etching

ONO KATSUYUKI2 citations54