Inventor

THOME BRUNO

DE3 patents

⚠️ This page may combine multiple inventors who share the name “THOME BRUNO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DEGUENTHER MARKUS

1 patent

US8705005B2Apr 22, 2014

Microlithographic illumination system

DEGUENTHER MARKUS9 citations82

ZEISS CARL SMT GMBH

1 patent

US9341953B2May 17, 2016

Microlithographic illumination system

ZEISS CARL SMT GMBH0 citations50

KAMENOV VLADIMIR

1 patent

US9733395B2Aug 15, 2017

Microlithographic projection exposure apparatus

KAMENOV VLADIMIR0 citations34