Inventor
HUDGENS JEFFREY
US30 patents
⚠️ This page may combine multiple inventors who share the name “HUDGENS JEFFREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US11527424B2Dec 13, 2022
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC16 citations93
US7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US7694688B2Apr 13, 2010
Wet clean system design
APPLIED MATERIALS INC20 citations88
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US10964584B2Mar 30, 2021
Process kit ring adaptor
APPLIED MATERIALS INC7 citations82
US11784074B2Oct 10, 2023
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC2 citations72
US11469123B2Oct 11, 2022
Mapping of a replacement parts storage container
APPLIED MATERIALS INC4 citations70
US10537997B2Jan 21, 2020
Sensor based auto-calibration wafer
APPLIED MATERIALS INC3 citations69
US11370114B2Jun 28, 2022
Autoteach enclosure system
APPLIED MATERIALS INC2 citations67
US12334376B2Jun 17, 2025
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC0 citations62
US11842917B2Dec 12, 2023
Process kit ring adaptor
APPLIED MATERIALS INC0 citations60
US12456638B2Oct 28, 2025
Methods and systems for temperature control for a substrate
APPLIED MATERIALS INC0 citations59
US12014944B2Jun 18, 2024
Mapping of a replacement parts storage container
APPLIED MATERIALS INC0 citations59
USD938373SDec 14, 2021
Substrate transfer structure
APPLIED MATERIALS INC0 citations58
US12076863B2Sep 3, 2024
Autoteach system
APPLIED MATERIALS INC0 citations56
US12288704B2Apr 29, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations55
US11413767B2Aug 16, 2022
Sensor-based position and orientation feedback of robot end effector with respect to destination chamber
APPLIED MATERIALS INC1 citations55
US12165905B2Dec 10, 2024
Process kit enclosure system
APPLIED MATERIALS INC0 citations50
ISHIKAWA TETSUYA
4 patentsUS8550031B2Oct 8, 2013
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA13 citations92
US8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92