Inventor
ITADANI KOJI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “ITADANI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAIHEN CORP
6 patentsUS6946847B2Sep 20, 2005
Impedance matching device provided with reactance-impedance table
DAIHEN CORP219 citations97
US6621372B2Sep 16, 2003
Impedance matching device
DAIHEN CORP60 citations95
US5843236ADec 1, 1998
Plasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamber
DAIHEN CORP58 citations93
US9059680B2Jun 16, 2015
Impedance adjusting apparatus
DAIHEN CORP8 citations80
US9270250B2Feb 23, 2016
High frequency matching system
DAIHEN CORP4 citations69
US11769651B2Sep 26, 2023
High-frequency power supply device and output method of high-frequency power
DAIHEN CORP2 citations64