Inventor

BABAYAN STEVEN

US7 patents

Patents

7 patents

US10964584B2Mar 30, 2021

Process kit ring adaptor

APPLIED MATERIALS INC7 citations82

US11842917B2Dec 12, 2023

Process kit ring adaptor

APPLIED MATERIALS INC0 citations60

US12165905B2Dec 10, 2024

Process kit enclosure system

APPLIED MATERIALS INC0 citations50

US12560916B2Feb 24, 2026

Adjusting chamber performance by equipment constant updates

APPLIED MATERIALS INC0 citations49

US12504726B2Dec 23, 2025

Determining equipment constant updates by machine learning

APPLIED MATERIALS INC0 citations49

US12498705B2Dec 16, 2025

Chamber matching by equipment constant updates

APPLIED MATERIALS INC0 citations49

US12211734B2Jan 28, 2025

Lift pin mechanism

APPLIED MATERIALS INC0 citations49