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Inventor
MATSUZAWA YUTAKA
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “MATSUZAWA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
1 patent
US6527969B1
Mar 4, 2003
Method and apparatus for rejuvenating polishing slurry
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
27 citations
90
PANASONIC CORP
1 patent
US7718926B2
May 18, 2010
Film deposition apparatus, film deposition method, monitoring program for film deposition apparatus, and recording medium thereof
PANASONIC CORP
7 citations
64
NIPPON STEEL & SUMIKIN MAT CO
1 patent
US9905817B2
Feb 27, 2018
Resin-metal composite seal container and method for producing same
NIPPON STEEL & SUMIKIN MAT CO
1 citations
48