Inventor
ITONAGA MASASHI
JP3 patents
Patents
3 patentsUS10141209B2Nov 27, 2018
Processing gas generating apparatus, processing gas generating method, substrate processing method, and storage medium
TOKYO ELECTRON LTD5 citations68
US11049758B2Jun 29, 2021
Substrate placing apparatus and substrate placing method
TOKYO ELECTRON LTD1 citations53
US10340140B2Jul 2, 2019
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47