Inventor
SOEDA MASARU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SOEDA MASARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AZBIL CORP
8 patentsUS11573142B2Feb 7, 2023
Capacitive diaphragm vacuum gauge including a pressure sensor with multiple recesses being formed in the diaphragm
AZBIL CORP2 citations71
US11054331B2Jul 6, 2021
Method and device for detecting malfunction of electrostatic-capacitance pressure sensor
AZBIL CORP3 citations71
US10670481B2Jun 2, 2020
Capacitive pressure sensor
AZBIL CORP3 citations71
US10620072B2Apr 14, 2020
Capacitive pressure sensor
AZBIL CORP4 citations71
US11313746B2Apr 26, 2022
Pressure sensor having a surface of a diaphragm held in a chemically inactive state
AZBIL CORP0 citations61
US10585010B2Mar 10, 2020
Pressure sensor having a temperature control unit and a temperature difference calculation unit
AZBIL CORP0 citations39
US10520385B2Dec 31, 2019
Vacuum gauge state detection method and system
AZBIL CORP0 citations39
US10161821B2Dec 25, 2018
Pressure sensor
AZBIL CORP0 citations39