Inventor
HAJAJ EITAN
IL11 patents
⚠️ This page may combine multiple inventors who share the name “HAJAJ EITAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
9 patentsUS11796925B2Oct 24, 2023
Scanning overlay metrology using overlay targets having multiple spatial frequencies
KLA CORP6 citations72
US11862524B2Jan 2, 2024
Overlay mark design for electron beam overlay
KLA CORP2 citations71
US11726410B2Aug 15, 2023
Multi-resolution overlay metrology targets
KLA CORP2 citations70
US12111580B2Oct 8, 2024
Optical metrology utilizing short-wave infrared wavelengths
KLA CORP2 citations67
US12055859B2Aug 6, 2024
Overlay mark design for electron beam overlay
KLA CORP0 citations60
US11703767B2Jul 18, 2023
Overlay mark design for electron beam overlay
KLA CORP0 citations58
US12105414B2Oct 1, 2024
Targets for diffraction-based overlay error metrology
KLA CORP0 citations50
US11720031B2Aug 8, 2023
Overlay design for electron beam and scatterometry overlay measurements
KLA CORP0 citations50
US11676909B2Jun 13, 2023
Metrology targets for high topography semiconductor stacks
KLA CORP0 citations50