Inventor
AHARON SHARON
IL5 patents
⚠️ This page may combine multiple inventors who share the name “AHARON SHARON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS10579768B2Mar 3, 2020
Process compatibility improvement by fill factor modulation
KLA TENCOR CORP3 citations72
US10901325B2Jan 26, 2021
Determining the impacts of stochastic behavior on overlay metrology data
KLA TENCOR CORP4 citations71
US12013634B2Jun 18, 2024
Reduction or elimination of pattern placement error in metrology measurements
KLA TENCOR CORP0 citations61
US11537043B2Dec 27, 2022
Reduction or elimination of pattern placement error in metrology measurements
KLA TENCOR CORP0 citations61