Inventor
DORAN SAMUEL K
US13 patents
⚠️ This page may combine multiple inventors who share the name “DORAN SAMUEL K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS5140242AAug 18, 1992
Servo guided stage system
IBM71 citations95
US4818885AApr 4, 1989
Electron beam writing method and system using large range deflection in combination with a continuously moving table
IBM79 citations94
US5716742AFeb 10, 1998
Real time alignment system for a projection electron beam lithographic system
IBM26 citations92
US5585629ADec 17, 1996
Electron beam nano-metrology system
IBM36 citations92
US5548195AAug 20, 1996
Compensated servo control stage positioning apparatus
IBM29 citations92
US4468565AAug 28, 1984
Automatic focus and deflection correction in E-beam system using optical target height measurements
IBM29 citations88
US6466324B1Oct 15, 2002
Servo guided stage system with yaw sensor
IBM10 citations73
US4066863AJan 3, 1978
Method and system for automatically correcting aberrations of a beam of charged particles
IBM8 citations71
US4568861AFeb 4, 1986
Method and apparatus for controlling alignment and brightness of an electron beam
IBM9 citations69
US4137459AJan 30, 1979
Method and apparatus for applying focus correction in E-beam system
IBM8 citations67
US6388516B1May 14, 2002
Precision high speed magnetic coil driver circuit
IBM4 citations62
US5648188AJul 15, 1997
Real time alignment system for a projection electron beam lithographic system
IBM3 citations62