Inventor

SHOJO Tadashi

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SHOJO Tadashi”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IWATANI CORP

2 patents

US11380586B2Jul 5, 2022

Cutting method

IWATANI CORP0 citations59

US11482455B2Oct 25, 2022

Cutting method of workpiece by forming reformed region and dry etching process

IWATANI CORP0 citations48

TOKYO ELECTRON LTD

2 patents

US12172198B2Dec 24, 2024

Gas cluster processing device and gas cluster processing method

TOKYO ELECTRON LTD0 citations58

US11267021B2Mar 8, 2022

Gas cluster processing device and gas cluster processing method

TOKYO ELECTRON LTD0 citations58