Inventor
HSIEH KUN-LUNG
TW21 patents
⚠️ This page may combine multiple inventors who share the name “HSIEH KUN-LUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
14 patentsUS11143952B2Oct 12, 2021
Pellicle removal method
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US12013632B2Jun 18, 2024
Pellicle having vent hole
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9857680B2Jan 2, 2018
Cleaning module, cleaning apparatus and method of cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US11714348B2Aug 1, 2023
Apparatus for removing a pellicle frame from a photomask and the method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11392025B2Jul 19, 2022
Apparatus for removing a pellicle frame from a photomask and the method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11703752B2Jul 18, 2023
Method of accelerated hazing of mask assembly
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10983430B2Apr 20, 2021
Mask assembly and haze acceleration method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12581754B2Mar 17, 2026
Method and apparatus to enhance semiconductor device manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11237478B2Feb 1, 2022
Cleaning module, cleaning apparatus and method of cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10877369B2Dec 29, 2020
Apparatus for removing a pellicle frame from a photomask and the method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9726990B2Aug 8, 2017
Lithography mask repair methods
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49
US9656278B2May 23, 2017
Jet spray nozzle and method for cleaning photo masks and semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10747105B2Aug 18, 2020
Cleaning module, cleaning apparatus and method of cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US12399439B2Aug 26, 2025
Pellicle, pellicle removal tool, and method of utilizing pellicle and pellicle removal tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44