Inventor
FUJII KATSUHISA
JP3 patents
Patents
3 patentsUS7947926B2May 24, 2011
Heat treatment apparatus, heat treatment method, and recording medium recording program for practicing the method
TOKYO ELECTRON LTD2 citations59
US7676296B2Mar 9, 2010
Substrate processing system, substrate processing method and computer-readable storage medium storing verification program
TOKYO ELECTRON LTD5 citations57
US12377519B2Aug 5, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations38