Inventor

WHITE NICHOLAS R

GB20 patents

⚠️ This page may combine multiple inventors who share the name “WHITE NICHOLAS R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WHITE NICHOLAS R

WHITE NICHOLAS R

Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams

Electromagnetic regulator assembly for adjusting and controlling the current uniformity of continuous ion beams

Open-ended electromagnetic corrector assembly and method for deflecting, focusing, and controlling the uniformity of a traveling ion beam

High aspect ratio, high mass resolution analyzer magnet and system for ribbon ion beams

Ribbon beam ion source of arbitrary length

Mass analyzer apparatus and systems operative for focusing ribbon ion beams and for separating desired ion species from unwanted ion species in ribbon ion beams

DIAMOND SEMICONDUCTOR GROUP

Compact high current broad beam ion implanter

High current ribbon beam ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT

Ion implanter having two-stage deceleration beamline

Wide dynamic range ion beam scanners

ADVANCED ION BEAM TECHNOLOGY I

Apparatus and methods for ion beam implantation using ribbon and spot beams

Compound sliding seal unit suitable for atmosphere to vacuum applications

VARIAN ASSOCIATES

Apparatus and method for temperature control of workpieces in vacuum

AXCELIS TECH INC

Wafer handling apparatus and method

APPLIED MATERIALS INC

Method and apparatus for broad beam ion implantation

CHEN JIONG

Apparatus and methods for ion beam implantation using ribbon and spot beams

KAIM ROBERT E

Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams

ADVANCED ION BEAM TECH INC

Single bend energy filter for controlling deflection of charged particle beam

ADVANCED ION BEAN TECHNOLOGY I

Apparatus and methods for ion beam implantation

IONEX HEI CORP

Apparatus for generating high currents of negative ions