Inventor
SHI HONGQIN
US26 patents
⚠️ This page may combine multiple inventors who share the name “SHI HONGQIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
REFLECTIVITY INC
6 patentsUS7041224B2May 9, 2006
Method for vapor phase etching of silicon
REFLECTIVITY INC72 citations97
US7215459B2May 8, 2007
Micromirror devices with in-plane deformable hinge
REFLECTIVITY INC56 citations96
US7119944B2Oct 10, 2006
Micromirror device and method for making the same
REFLECTIVITY INC46 citations92
US6942811B2Sep 13, 2005
Method for achieving improved selectivity in an etching process
REFLECTIVITY INC19 citations92
US7027200B2Apr 11, 2006
Etching method used in fabrications of microstructures
REFLECTIVITY INC11 citations84
US6939472B2Sep 6, 2005
Etching method in fabrications of microstructures
REFLECTIVITY INC10 citations73
GOOGLE INC
5 patentsUS9213178B1Dec 15, 2015
Lens with lightguide insert for head wearable display
GOOGLE INC55 citations98
US9568734B1Feb 14, 2017
Lens with lightguide insert for head wearable display
GOOGLE INC16 citations92
US10338390B2Jul 2, 2019
Method for fabricating a curved eyepiece
GOOGLE INC3 citations70
US9399596B1Jul 26, 2016
Methods and systems for bonding multiple wafers
GOOGLE INC2 citations61
US9789675B1Oct 17, 2017
Method, apparatus and system for providing a uniform laminate structure
GOOGLE INC0 citations42
TEXAS INSTRUMENTS INC
5 patentsUS7307775B2Dec 11, 2007
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC35 citations89
US7483198B2Jan 27, 2009
Micromirror device and method for making the same
TEXAS INSTRUMENTS INC11 citations84
US7362494B2Apr 22, 2008
Micromirror devices and methods of making the same
TEXAS INSTRUMENTS INC12 citations84
US7189332B2Mar 13, 2007
Apparatus and method for detecting an endpoint in a vapor phase etch
TEXAS INSTRUMENTS INC8 citations73
US7645704B2Jan 12, 2010
Methods and apparatus of etch process control in fabrications of microstructures
TEXAS INSTRUMENTS INC3 citations62
WAYMO LLC
4 patentsUS11500295B2Nov 15, 2022
Systems and methods for contact immersion lithography
WAYMO LLC4 citations71
US10948830B1Mar 16, 2021
Systems and methods for lithography
WAYMO LLC3 citations71
US11892777B2Feb 6, 2024
Systems and methods for contact immersion lithography
WAYMO LLC0 citations60
US11275312B1Mar 15, 2022
Systems and methods for verifying photomask cleanliness
WAYMO LLC0 citations45
UNIV ROCHESTER
3 patentsUS5332522AJul 26, 1994
Thermotropic chiral nematic liquid crystalline copolymers
UNIV ROCHESTER79 citations93
US5514296AMay 7, 1996
Glassy low molar mass chiral nematic liquid crystalline compositions and optical articles formed therefrom
UNIV ROCHESTER17 citations73
US5378393AJan 3, 1995
Glassy chiral nematic liquid crystalline compositions of low molar mass and optical devices formed from same
UNIV ROCHESTER11 citations73