Inventor

MAEGAWA SHIGEKI

JP4 patents

Patents

4 patents

US5766989AJun 16, 1998

Method for forming polycrystalline thin film and method for fabricating thin-film transistor

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD283 citations98

US5591668AJan 7, 1997

Laser annealing method for a semiconductor thin film

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD233 citations98

US5580801ADec 3, 1996

Method for processing a thin film using an energy beam

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD35 citations92

US5523865AJun 4, 1996

Liquid-crystal display top gate thin film transistor with particular connection between the drain and the display electrode

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD42 citations92