Inventor

NARAYANSWAMI NATRAJ

US4 patents

⚠️ This page may combine multiple inventors who share the name “NARAYANSWAMI NATRAJ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FSI INT INC

3 patents

US5810942ASep 22, 1998

Aerodynamic aerosol chamber

FSI INT INC63 citations94

US6681781B2Jan 27, 2004

Methods for cleaning microelectronic substrates using ultradilute cleaning liquids

FSI INT INC51 citations93

US6578369B2Jun 17, 2003

Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices

FSI INT INC23 citations86

SEMIQUEST INC

1 patent

US7530880B2May 12, 2009

Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitor

SEMIQUEST INC54 citations95