Inventor
SIEFERING KEVIN L
US15 patents
⚠️ This page may combine multiple inventors who share the name “SIEFERING KEVIN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
7 patentsUS5810942ASep 22, 1998
Aerodynamic aerosol chamber
FSI INT INC63 citations94
US6251195B1Jun 26, 2001
Method for transferring a microelectronic device to and from a processing chamber
FSI INT INC43 citations90
US6221781B1Apr 24, 2001
Combined process chamber with multi-positionable pedestal
FSI INT INC73 citations90
US5942037AAug 24, 1999
Rotatable and translatable spray nozzle
FSI INT INC45 citations87
US6284006B1Sep 4, 2001
Processing apparatus for microelectronic devices in which polymeric bellows are used to help accomplish substrate transport inside of the apparatus
FSI INT INC38 citations86
US7312161B2Dec 25, 2007
Advanced process control for low variation treatment in immersion processing
FSI INT INC7 citations73
US6845779B2Jan 25, 2005
Edge gripping device for handling a set of semiconductor wafers in an immersion processing system
FSI INT INC7 citations70
TEL FSI INC
4 patentsUS9831107B2Nov 28, 2017
Processing system and method for providing a heated etching solution
TEL FSI INC4 citations70
US9490138B2Nov 8, 2016
Method of substrate temperature control during high temperature wet processing
TEL FSI INC2 citations62
US9412639B2Aug 9, 2016
Method of using separate wafer contacts during wafer processing
TEL FSI INC2 citations61
US9911631B2Mar 6, 2018
Processing system and method for providing a heated etching solution
TEL FSI INC0 citations49