Inventor
MORITA KEIJI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MORITA KEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA CERAMICS CO
3 patentsUS6834613B1Dec 28, 2004
Plasma-resistant member and plasma treatment apparatus using the same
TOSHIBA CERAMICS CO27 citations90
US6492042B2Dec 10, 2002
Ceramics material and producing the same
TOSHIBA CERAMICS CO23 citations89
US6838405B2Jan 4, 2005
Plasma-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same
TOSHIBA CERAMICS CO3 citations61