Inventor
NYUI MASARU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “NYUI MASARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
14 patentsUS6004187ADec 21, 1999
Method and apparatus for measuring film thickness and film thickness distribution during polishing
CANON KK115 citations97
US6142855ANov 7, 2000
Polishing apparatus and polishing method
CANON KK67 citations96
US6551172B1Apr 22, 2003
Polishing apparatus and polishing method
CANON KK19 citations92
US6503361B1Jan 7, 2003
Polishing method and polishing apparatus using the same
CANON KK34 citations92
US6137575AOct 24, 2000
Film thickness measuring method and apparatus
CANON KK35 citations92
US6120349ASep 19, 2000
Polishing system
CANON KK32 citations92
US6093081AJul 25, 2000
Polishing method and polishing apparatus using the same
CANON KK27 citations92
US5481106AJan 2, 1996
Encoder with an optical scale and interference of zero and first order diffraction beams
CANON KK32 citations92
US5359193AOct 25, 1994
Talbot's interference type optical encoder
CANON KK34 citations92
US5640377AJun 17, 1997
Rotation information detecting apparatus and method
CANON KK15 citations74
US5302821AApr 12, 1994
Encoder using a birefringent element and a system including the same
CANON KK14 citations74
US5559602ASep 24, 1996
Rotation measuring apparatus and displacement measuring apparatus
CANON KK8 citations73
US5369271ANov 29, 1994
Rotation detector using dual position interference light
CANON KK12 citations73
US7916273B2Mar 29, 2011
Exposure apparatus and device manufacturing method
CANON KK0 citations42