Inventor
OLGADO DONALD J
US11 patents
Patents
11 patentsUS6258220B1Jul 10, 2001
Electro-chemical deposition system
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US6517130B1Feb 11, 2003
Self positioning vacuum chuck
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US6824612B2Nov 30, 2004
Electroless plating system
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US6635157B2Oct 21, 2003
Electro-chemical deposition system
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US6612014B1Sep 2, 2003
Dual post centrifugal wafer clip for spin rinse dry unit
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US6571657B1Jun 3, 2003
Multiple blade robot adjustment apparatus and associated method
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US6454927B1Sep 24, 2002
Apparatus and method for electro chemical deposition
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US7497932B2Mar 3, 2009
Electro-chemical deposition system
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US6432282B1Aug 13, 2002
Method and apparatus for supplying electricity uniformly to a workpiece
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US6369493B1Apr 9, 2002
Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket
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US7005046B2Feb 28, 2006
Apparatus for electro chemical deposition
APPLIED MATERIALS INC2 citations60