Inventor
GRUNES HOWARD E
US13 patents
⚠️ This page may combine multiple inventors who share the name “GRUNES HOWARD E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6640151B1Oct 28, 2003
Multi-tool control system, method and medium
APPLIED MATERIALS INC167 citations99
US5656093AAug 12, 1997
Wafer spacing mask for a substrate support chuck and method of fabricating same
APPLIED MATERIALS INC849 citations98
US7048837B2May 23, 2006
End point detection for sputtering and resputtering
APPLIED MATERIALS INC68 citations97
US6468353B1Oct 22, 2002
Method and apparatus for improved substrate handling
APPLIED MATERIALS INC78 citations96
US5387067AFeb 7, 1995
Direct load/unload semiconductor wafer cassette apparatus and transfer system
APPLIED MATERIALS INC59 citations96
US6824612B2Nov 30, 2004
Electroless plating system
APPLIED MATERIALS INC67 citations95
US6486444B1Nov 26, 2002
Load-lock with external staging area
APPLIED MATERIALS INC101 citations95
US5556248ASep 17, 1996
Semiconductor wafer cassette transfer system
APPLIED MATERIALS INC21 citations92
US7138014B2Nov 21, 2006
Electroless deposition apparatus
APPLIED MATERIALS INC37 citations91
US6575737B1Jun 10, 2003
Method and apparatus for improved substrate handling
APPLIED MATERIALS INC45 citations91
US6409890B1Jun 25, 2002
Method and apparatus for forming a uniform layer on a workpiece during sputtering
APPLIED MATERIALS INC10 citations74