Inventor
MOK YEUK-FAI EDWIN
US11 patents
Patents
11 patentsUS6516815B1Feb 11, 2003
Edge bead removal/spin rinse dry (EBR/SRD) module
APPLIED MATERIALS INC332 citations96
US6824612B2Nov 30, 2004
Electroless plating system
APPLIED MATERIALS INC67 citations95
US6537011B1Mar 25, 2003
Method and apparatus for transferring and supporting a substrate
APPLIED MATERIALS INC68 citations93
US6466426B1Oct 15, 2002
Method and apparatus for thermal control of a semiconductor substrate
APPLIED MATERIALS INC57 citations93
US7223323B2May 29, 2007
Multi-chemistry plating system
APPLIED MATERIALS INC44 citations92
US6158384ADec 12, 2000
Plasma reactor with multiple small internal inductive antennas
APPLIED MATERIALS INC56 citations92
US7138014B2Nov 21, 2006
Electroless deposition apparatus
APPLIED MATERIALS INC37 citations91
US6178920B1Jan 30, 2001
Plasma reactor with internal inductive antenna capable of generating helicon wave
APPLIED MATERIALS INC35 citations89
US7311810B2Dec 25, 2007
Two position anneal chamber
APPLIED MATERIALS INC11 citations84
US6689418B2Feb 10, 2004
Apparatus for wafer rinse and clean and edge etching
APPLIED MATERIALS INC9 citations73
US6869516B2Mar 22, 2005
Method for removing electrolyte from electrical contacts and wafer touching areas
APPLIED MATERIALS INC2 citations63