Inventor
MAEJIMA SHINROKU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MAEJIMA SHINROKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RENESAS TECH CORP
3 patentsUS6811939B2Nov 2, 2004
Focus monitoring method, focus monitoring system, and device fabricating method
RENESAS TECH CORP19 citations92
US6764794B2Jul 20, 2004
Photomask for focus monitoring
RENESAS TECH CORP11 citations72
US6890692B2May 10, 2005
Method of focus monitoring and manufacturing method for an electronic device
RENESAS TECH CORP2 citations61
MITSUBISHI ELECTRIC CORP
3 patentsUS6617080B1Sep 9, 2003
Photomask, semiconductor device, and method for exposing through photomask
MITSUBISHI ELECTRIC CORP26 citations90
US6153941ANov 28, 2000
Semiconductor registration measurement mark
MITSUBISHI ELECTRIC CORP16 citations82
US6479904B1Nov 12, 2002
Semiconductor device with registration accuracy measurement mark
MITSUBISHI ELECTRIC CORP9 citations71