Inventor · disambiguated record
Kyung-Dae Kim
Also filed as: KIM KYUNG DAE
10 granted patents·3 pending applications·87 citations·filing 2000–2010
88Inventor score
Top patents by PatentIndex Score
13 records- 0185US6537143B1Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Mar 25, 2003·32 cites·9 claims
- 0273US6860801B2Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Mar 1, 2005·14 cites·4 claims
- 0370US6443826B1Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Sep 3, 2002·15 cites·14 claims
- 0468US6655042B2System and method for drying semiconductor substrateSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Dec 2, 2003·12 cites·35 claims
- 0555US7223721B2Resist and etching by-product removing composition and resist removing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 29, 2007·1 cites·18 claims
- 0655US6713440B2Resist and etching by-product removing composition and resist removing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Mar 30, 2004·3 cites·21 claims
- 0751US7081182B2Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing processSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Jul 25, 2006·5 cites·5 claims
- 0850US6898007B2Microscope for inspecting semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted May 24, 2005·5 cites·21 claims
- 0945US6777379B2Cleaning solution and method of cleaning anti-reflective coating composition using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Aug 17, 2004·0 cites·8 claims
- 1041US2008045632A1Method for preventing blocking and deterioration in flowability of epoxy molding compound powderJO JEONG YONG·Filed 2006·Application pending·0 cites
- 1139US2011050631A1Touch sensorSAIN INFOCOM·Filed 2010·Application pending·0 cites
- 1232US2001053665A1Polishing head of a chemical and mechanical polishing apparatusFiled 2001·Application pending·0 cites
- 1330US7208454B2Cleaning solution for removing anti-reflective coating compositionSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Apr 24, 2007·0 cites·5 claims
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