Inventor

CHUNG HOI-SIK

KR2 patents

Patents

2 patents

US7208454B2Apr 24, 2007

Cleaning solution for removing anti-reflective coating composition

SAMSUNG ELECTRONICS CO LTD0 citations48

US6777379B2Aug 17, 2004

Cleaning solution and method of cleaning anti-reflective coating composition using the same

SAMSUNG ELECTRONICS CO LTD0 citations48