Inventor
KNOTT RICHARD A
US5 patents
Patents
5 patentsUS7768267B2Aug 3, 2010
Ionization gauge with a cold electron source
BROOKS AUTOMATION INC21 citations91
US7456634B2Nov 25, 2008
Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
BROOKS AUTOMATION INC19 citations89
US7429863B2Sep 30, 2008
Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
BROOKS AUTOMATION INC8 citations71
US7847559B2Dec 7, 2010
Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
BROOKS AUTOMATION INC6 citations70
US7656165B2Feb 2, 2010
Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
BROOKS AUTOMATION INC0 citations50