Inventor
GUENSCHEL ROLAND
DE5 patents
Patents
5 patentsUS7093493B2Aug 22, 2006
Pressure sensor having a silicon chip on a steel diaphragm
BOSCH GMBH ROBERT15 citations82
US7055392B2Jun 6, 2006
Micromechanical pressure sensor
BOSCH GMBH ROBERT11 citations82
US7493819B2Feb 24, 2009
Micromechanical pressure sensor system
BOSCH GMBH ROBERT6 citations60
US7872487B2Jan 18, 2011
Semiconductor wafer having a multitude of sensor elements and method for measuring sensor elements on a semiconductor wafer
BOSCH GMBH ROBERT1 citations47
US10466197B2Nov 5, 2019
Component part having a MECS component on a mounting carrier
BOSCH GMBH ROBERT0 citations39