Inventor
YEN KAI-HSIANG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “YEN KAI-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
8 patentsUS7902843B2Mar 8, 2011
Sensor
IND TECH RES INST30 citations91
US7125795B2Oct 24, 2006
Fabrication method for microstructures with high aspect ratios
IND TECH RES INST7 citations72
US6600644B1Jul 29, 2003
Microelectronic tunable capacitor and method for fabrication
IND TECH RES INST7 citations67
US8039910B2Oct 18, 2011
Electro-acoustic sensing device
IND TECH RES INST6 citations61
US6804443B2Oct 12, 2004
Test structure and method of step coverage for optical waveguide production
IND TECH RES INST0 citations51
US8035402B2Oct 11, 2011
Sensor
IND TECH RES INST0 citations50
US7208065B2Apr 24, 2007
Structure for measuring the etching speed
IND TECH RES INST0 citations46
US6828164B2Dec 7, 2004
Method for measuring the etching speed
IND TECH RES INST0 citations46