Inventor

STEIGERWALD CHRISTIAN

DE2 patents

⚠️ This page may combine multiple inventors who share the name “STEIGERWALD CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FIOLKA DAMIAN

1 patent

US8587767B2Nov 19, 2013

Illumination optics for EUV microlithography and related system and apparatus

FIOLKA DAMIAN12 citations82

TEUFELBESCHLAG GMBH

1 patent

US10590694B2Mar 17, 2020

Glass door apparatus

TEUFELBESCHLAG GMBH0 citations18