Inventor
WALDIS SEVERIN
DE12 patents
⚠️ This page may combine multiple inventors who share the name “WALDIS SEVERIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
8 patentsUS9523922B2Dec 20, 2016
Illumination system of a microlithographic projection exposure apparatus having a temperature control device
ZEISS CARL SMT GMBH3 citations71
US9791691B2Oct 17, 2017
Mirror array
ZEISS CARL SMT GMBH2 citations68
US9274434B2Mar 1, 2016
Light modulator and illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH2 citations61
US9116440B2Aug 25, 2015
Optical module for guiding a radiation beam
ZEISS CARL SMT GMBH2 citations54
US9946161B2Apr 17, 2018
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
ZEISS CARL SMT GMBH1 citations51
US9535336B2Jan 3, 2017
Microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US9804501B2Oct 31, 2017
Optical component
ZEISS CARL SMT GMBH1 citations46
US10078271B2Sep 18, 2018
Optical component
ZEISS CARL SMT GMBH0 citations36